Honeywell 13V Series stainless steel pressure sensors are designed for Ultra High Purity (UHP) applications that involve measurement of gases and liquid flow in harsh environments.
The rugged, media isolated package pressure sensor uses the Honeywell proven piezoresistive semiconductor sensor chip in an oil-isolated housing. This design has proven to be highly reliable, stable and accurate. Designed with a SEMI F20 compatible ring and diaphragm, this sensor exhibits exceptional corrosion resistance and specifically designed to withstand the aggressive nature of halogenated gases commonly encountered in semiconductor manufacturing processes. Its robust construction ensures protection against environmental factors while maintaining accurate pressure measurements.
The 13V pressure sensor designed to minimize the offset drift under prolonged vacuum conditions, making it an ideal choice for critical industrial applications where measurement accuracy and material integrity are crucial. These sensors feature a weldring collar and special back support ring for high cycle life capability as they are designed for further package integration in OEM (Original Equipment Manufacturer) applications.
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